(2007). Spectroscopic ellipsometry analysis of nanoporous low dielectric constant films processed via supercritical carbon dioxide for next-generation microelectronic devices by Maslina Othman. [electronic resource].
Chicago Style (17th ed.) CitationSpectroscopic Ellipsometry Analysis of Nanoporous Low Dielectric Constant Films Processed via Supercritical Carbon Dioxide for Next-generation Microelectronic Devices by Maslina Othman. [electronic Resource]. 2007.
MLA (9th ed.) CitationSpectroscopic Ellipsometry Analysis of Nanoporous Low Dielectric Constant Films Processed via Supercritical Carbon Dioxide for Next-generation Microelectronic Devices by Maslina Othman. [electronic Resource]. 2007.
Warning: These citations may not always be 100% accurate.