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| Format: | Buch |
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| Sprache: | Englisch |
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| format | Book |
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| id | e0cc23dc-9634-4e60-94ab-7e4e62d07b35 |
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| language | eng |
| physical | 1 volume |
| publication | – publisher: National Aeronautics and Space Administration dateOfPublication: 1995 |
| publishDate | 1995 |
| subjects | |
| title | Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers D.J. Larkin. [microform] / |
| topic | Additives. Epitaxy. Nitrogen. Silicon. Vapor deposition. |