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| Format: | Buch |
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| Sprache: | Englisch |
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| era | |
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| format | Book |
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| id | d460fb60-00a8-4155-9035-d8eb29736dc6 |
| isbn | 9780123538550 : |
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| language | eng |
| physical | xiii, 452 pages :illustrations ;24 cm |
| publication | – publisher: Academic Press dateOfPublication: 1989 |
| publishDate | 1989 |
| subjects | |
| title | SEM microcharacterization of semiconductors / edited by, D.B. Holt & D.C. Joy. |
| topic | Scanning electron microscopes. Semiconductors. |