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| era | |
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| format | Book |
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| geographic | |
| id | bfa3ca02-c494-4ab5-8900-e3910ac69b56 |
| isbn | 9780792383581 (alk. paper) |
| issn | |
| language | eng |
| physical | xxiv, 148 pages :illustrations ;25 cm |
| publication | – publisher: Kluwer Academic Publishers dateOfPublication: ©1999 |
| publishDate | ©1999 |
| subjects | |
| title | Microcantilevers for atomic force microscope data storage / by Benjamin W. Chui. |
| topic | Optical storage devices. Scanning electron microscopes. |