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| Natura: | Libro |
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| Lingua: | inglese |
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| format | Book |
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| id | bd4431db-cf87-4b60-b464-b3e9df8df321 |
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| language | eng |
| physical | 1 online resource (ix, 460 pages) :illustrations. |
| publication | – publisher: Electrochemical Society dateOfPublication: ©2006 |
| publishDate | ©2006 |
| subjects | |
| title | Advanced gate stack, source/drain, and channel engineering for Si-based CMOS 2 new materials, processes and equipment / editors F. Roozeboom [and others]. [electronic resource] : |
| topic | Gate array circuits Metal oxide semiconductors, Complementary Metal oxide semiconductors |