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era
format Book
genre
geographic
id a737d788-e483-4296-bf9b-314f516ca29a
isbn
issn
language eng
physical 1 volume
publication – publisher: National Aeronautics and Space Administration
  dateOfPublication: 1996
publishDate 1996
subjects
title Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry A.R. Heyd [and others]. [microform] /
topic Ellipsometry.
Germanium compounds.
Silicon compounds.
Spectroscopic analysis.
Strain measurement.
Superlattices.
Thickness.