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| Materialtyp: | Bok |
|---|---|
| Språk: | engelska |
| Ämnen: | |
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| era | |
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| format | Book |
| genre | |
| geographic | |
| id | 952cd946-db62-4e78-b6dc-ce8da09be608 |
| isbn | 9783540431435 (alk. paper) |
| issn | |
| language | eng |
| physical | viii, 142 pages :illustrations ;25 cm |
| publication | – publisher: Springer dateOfPublication: ©2002 |
| publishDate | ©2002 |
| subjects | |
| title | CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications / D. Lange, O. Brand, H. Baltes. |
| topic | Atomic force microscopy Gas detectors Levers Metal oxide semiconductors, Complementary Microelectromechanical systems |