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Formato: Livro
Idioma:inglês
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format Book
genre
geographic
id 897d635a-4e0b-4eaa-b941-d47620be2e30
isbn 9789027719393
issn
language eng
physical viii, 369 pages :illustrations ;24 cm
publication – publisher: KTK Scientific
  dateOfPublication: ©1985
publishDate ©1985
subjects
title Layered structures and interface kinetics : their technology and applications / edited by S. Furukawa.
topic Epitaxy
Integrated circuits
Layer structure (Solids)
Silicon-on-insulator technology.
Solid state electronics
Conference papers and proceedings.