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| Format: | Buch |
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| Sprache: | Englisch |
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| era | |
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| format | Book |
| genre | |
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| id | 897d635a-4e0b-4eaa-b941-d47620be2e30 |
| isbn | 9789027719393 |
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| language | eng |
| physical | viii, 369 pages :illustrations ;24 cm |
| publication | – publisher: KTK Scientific dateOfPublication: ©1985 |
| publishDate | ©1985 |
| subjects | |
| title | Layered structures and interface kinetics : their technology and applications / edited by S. Furukawa. |
| topic | Epitaxy Integrated circuits Layer structure (Solids) Silicon-on-insulator technology. Solid state electronics Conference papers and proceedings. |