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| Materiálatiipa: | Girji |
|---|---|
| Giella: | eaŋgalasgiella |
| Fáttát: | |
| Fáddágilkorat: |
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| era | |
|---|---|
| format | Book |
| genre | |
| geographic | |
| id | 28f1fb87-4d95-4929-85cd-41a9deaee5cf |
| isbn | 1000023362 9780429291890 0429291892 9781000023220 1000023222 9781000023299 100002329X 9780367446062 0367446065 9781420059113 1420059114 9781420059137 1420059130 9781000023367 |
| issn | |
| language | eng |
| physical | 1 online resource (221 pages :186 illustrations). |
| publication | – publisher: CRC Press dateOfPublication: 2019 |
| publishDate | 2019 |
| subjects | |
| title | Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / Ungyu Paik, Jea-Gun Park. |
| topic | Chemical mechanical planarization. Nanoparticles. Nanoelectronics. SCIENCE / Chemistry / Industrial & Technical TECHNOLOGY / Electronics / Microelectronics TECHNOLOGY / Engineering / Chemical & Biochemical Chemical mechanical planarization. Nanoelectronics. Nanoparticles. Electronic books. |