| era | |
|---|---|
| format | Book |
| genre | |
| geographic | |
| id | 16a39c77-7552-4fae-880e-e148aefca04e |
| isbn | 9783642129025 |
| issn | |
| language | eng |
| physical | xii, 444 pages :illustrations (some color) ;24 cm |
| publication | – publisher: Springer dateOfPublication: ©2011 |
| publishDate | ©2011 |
| subjects | |
| title | Design and manufacturing of active microsystems / Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, editors. |
| topic | Microelectromechanical systems. Microelectronics. |