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era
format Book
genre
geographic
id 0935e6f9-86cc-44c8-a181-c8fcd4e05373
isbn
issn
language eng
physical iii, 32 pages :illustrations
publication – publisher: US Dept of Commerce National Bureau of Standards
  dateOfPublication: 1986
publishDate 1986
subjects
title Analytic analysis of ellipsometric errors Deane Chandler-Horowitz. [microform] /
topic Ellipsometry
Government publications